ALD, ald coating, ald equipment, ald film, ald nitride, ald oxide, ald process, ald process tool, ald reactor, ald research, ald system, ald tool, aluminum oxide, atomic layer deposition, atomic layer deposition equipment, atomic layer deposition oxide, atomic layer deposition nitride, atomic layer deposition reactor, atomic layer deposition system, atomic layer deposition tool, atomic layer epitaxy, coating, conformal film, corrosion resistant, dielectric, diffusion barrier, DRAM memory, electroluminescent display, film deposition, fuel cell, gate dielectric, hafnium oxide, high aspect ratio,
high-k, lanthanum oxide, MEMS, metal nitride, metal oxide, nanolaminate, nanotechnology, picosun, picosun ald, picosun finland, picosun oy, pinhole free, process equipment, process tool, self-saturating growth, sunale, surface controlled deposition, tantalum nitride, tantalum oxide, thin film, tin oxide, titanium dioxide, titanium nitride, titanium oxide, zinc oxide

Picosun - Atomic Layer Deposition

-January 29th, 2010
Picosun introduces revolutionary sealed precursor cartridge
-
-December 17th, 2009
Picosun chooses dpUNION as its distribution partner in Brazil
-
-December 8th, 2009
Picosun and Ångström Laboratory in Uppsala, Sweden partner in ALD
-
-November 30th, 2009
Picosun launches 200 mm batch production ALD system
-
-November 17th, 2009
Picosun tops previous 12 month sales record in six months
-
-September 30th, 2009
Picosun contributes to new world record in X-ray microscopy
-
-August 28th, 2009
Picosun fiscal Q1 sales break previous company records
-
More news
Picosun develops and manufactures Atomic Layer Deposition (ALD) tools for micro- and nanotechnology
SUNALE™ R-series Atomic Layer Deposition (ALD) systems are optimized for research, product development and pilot production. The versatile reactor design enables deposition on 2-8’’ (50-200 mm) wafers, 3-dimensional objects and porous substrates. Read more SUNALE™ P-series Atomic Layer Deposition (ALD) systems are fast and reliable compact size reactors for production purposes. The reactor design is optimized for efficient processing of 4-6’’ wafer batches (25 wafers). Performance of the ALD tool can be maximized with the use of a robotic handler. Read more
R-series publications lists scientific papers where SUNALE™ R-series Atomic Layer Deposition (ALD) reactors have been used as a part of the research work. Read more Our products Frequently Asked Questions section contains relevant information about the whole Picosun Atomic Layer Deposition (ALD) equipment product portfolio. Read more