Microelectromechanical systems (MEMS)

MEMS manufacturing industry utilizes the electrical and mechanical properties of silicon and other materials in various types of devices and applications. ALD is especially well suited for protecting and functionalizing layers in 3-dimensional devices and features with high aspect ratios. Picosun is the market leader in delivering cost-effective batch systems for MEMS applications, where high level of conformality and film quality is required. Picosun offers a multitude of solutions for MEMS customers, ranging from metal oxides for insulators, passivation, etch stopping layers and barriers to hybrid materials and nanolaminates for hydrophobic and hydrophilic layers, moisture protection, anti-sticking layers and optical layers for sensors, print heads, optoelectrical MEMS, microphones and RF MEMS manufacturers.

Picosun products for MEMS

PICOSUN™ P-300F
PICOSUN™ P-300S
PICOSUN™ P-300B
PICOSUN™ P-300BV
PICOSUN™ R&D systems
PicoSupport™ services