Solid state lighting (LEDs)
LED industry requires ALD to enable products with higher brightness, longer lifetime, and low consumption of electricity. Picosun provides a complete range of ALD systems with high efficiency and throughput for 50 – 150 mm GaN on Si, GaN, and sapphire wafers for LED manufacturing. Picosun is working with the technology leaders in the LED industry for passivation and moisture protection of LEDs, for creating buffer and interface layers, and to enable new 3D LED chips and more efficient phosphors. Typical ALD materials for LEDs are nitrides, oxides, and transparent conductive oxides. For these processes, Picosun offers coating equipment suitable for single wafer, batch, or powder substrate processing.