Media

Oct 21, 2014:
Picosun ALD improves inkjets

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Sep 30, 2014:
Breakthrough in ALD-graphene by Picosun technology

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Aug 25, 2014:
Picosun joins forces with IMEC for novel, industrial ALD applications

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Customer testimonials

Before purchasing our ALD system we carefully investigated several alternatives. In the PICOSUN™ system we found many advantages over the others. For making good devices, good thermal stability and very uniform deposition are essential. We also love the handy operation system.

Picosun provides us high quality products, friendly and appropriate advice, and good after sales support. We are very satisfied with our ALD tool and we recommend PICOSUN™ systems to all research institutes to manufacture high quality ALD films and to companies to utilize the good research results.

Dr. Yuichi Harada, NTT Basic Research Laboratories, Atsugi, Japan

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ALD APPLICATIONS

  • Electronics

    Electronics
  • Sensors

    Sensors
  • Semiconductors

    Semiconductors
  • MEMS

    MEMS
  • Microchips

    Microchips
  • Corrosion protection

    Corrosion protection
  • Antitarnishing

    Antitarnishing
  • Energy storage

    Energy storage
  • Decorative coatings

    Decorative coatings
  • Lighting

    Lighting
  • Optics and displays

    Optics and displays
  • Nanotechnology

    Nanotechnology
  • Solar photovoltaics

    Solar photovoltaics

PICOSUN R系列
专为研发而设计 

r-sarja

PICOSUN™ R-系列原子层沉积(ALD)系统专门针对研究、生产开发和试生产进行优化。用途广泛的反应器设计使 2-8’’(50-200 毫米)的晶片、三维物体,以及多孔基片上均可进行沉积。 

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PICOSUN P系列
ALD工业化生产系统的新标准

p-sarja

PICOSUN™ P-系列原子层沉积(ALD)系统是完全按照ALD原理的需求而专利设计,可提供极高的工艺速度,极低的拥有成本,为ALD工业化生产工具设定了一个崭新的标准。 

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EXAMPLES OF ALD MATERIALS*

Oxides
Al2O3, AlxTiyOz, Gd2O3, HfO2, In2O3, MgO, Sb2O3, SiO2, SrTiOx, Ta2O5, TiO2, Y2O3, ZnO, ZnO:Al, ZrO2
Nitrides
AlN, TiAlCN, TiN, TaNx
Carbides
TiC
Sulfides
Gd2O2S, In2S3, InxZnyS, ZnS
Fluorides   
CaF2, MgF2
Metals
Ag, Au, Cu, Ir, Pd, Pt, Ru
   
Self-assembled monolayers (SAMs) for growth inhibition
 
Polymers and inorganic-organic hybrid materials
 

* The list in non-inclusive - for more detailed information please contact Picosun directly.

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