Media

Jul 3, 2014:
Novel, industrial metallization solutions from Picosun

了解更多

Jun 16, 2014:
PICOSUN™ P-300B ALD production tool is a success

了解更多

May 28, 2014:
New industrial ALD processes from Picosun

了解更多

存档

Customer testimonials

"The fact that Picosun has been involved in the ALD industry since its infancy speaks volumes about their technical expertise and the learning curve that's gone into designing the tool."

" I would recommend the PICOSUN™ R-series platform to any academic or national laboratory looking to do thin film research. Operationally, the system is both flexible and robust enough to meet the demands of a highly technical, multiple user facility."

Mr. Bryant Colwill, Rensselaer Polytechnic Institute, Troy, New York, USA 

Read more 

ALD APPLICATIONS

  • Electronics

    Electronics
  • Sensors

    Sensors
  • Semiconductors

    Semiconductors
  • MEMS

    MEMS
  • Microchips

    Microchips
  • Corrosion protection

    Corrosion protection
  • Antitarnishing

    Antitarnishing
  • Energy storage

    Energy storage
  • Decorative coatings

    Decorative coatings
  • Lighting

    Lighting
  • Optics and displays

    Optics and displays
  • Nanotechnology

    Nanotechnology
  • Solar photovoltaics

    Solar photovoltaics

PICOSUN R系列
专为研发而设计 

R-series nosto small

PICOSUN™ R-系列原子层沉积(ALD)系统专门针对研究、生产开发和试生产进行优化。用途广泛的反应器设计使 2-8’’(50-200 毫米)的晶片、三维物体,以及多孔基片上均可进行沉积。 

了解更多

PICOSUN P系列
ALD工业化生产系统的新标准

P-series nosto small

PICOSUN™ P-系列原子层沉积(ALD)系统是完全按照ALD原理的需求而专利设计,可提供极高的工艺速度,极低的拥有成本,为ALD工业化生产工具设定了一个崭新的标准。 

了解更多

EXAMPLES OF ALD MATERIALS*

Oxides
Al2O3, AlxTiyOz, Gd2O3, HfO2, In2O3, MgO, Sb2O3, SiO2, SrTiOx, Ta2O5, TiO2, Y2O3, ZnO, ZnO:Al, ZrO2
Nitrides
AlN, TiAlCN, TiN, TaNx
Carbides
TiC
Sulfides
Gd2O2S, In2S3, InxZnyS, ZnS 
Fluorides    
CaF2, MgF2
Metals
Ag, Au, Cu, Ir, Pd, Pt, Ru

Self-assembled monolayers (SAMs) for growth inhibition

Polymers and inorganic-organic hybrid materials

* The list in non-inclusive - for more detailed information please contact Picosun directly.

Request a coating demo