Media

Jul 3, 2014:
Novel, industrial metallization solutions from Picosun

Read More

Jun 16, 2014:
PICOSUN™ P-300B ALD production tool is a success

Read More

May 28, 2014:
New industrial ALD processes from Picosun

Read More

Archive

Customer testimonials

Before purchasing our ALD system we carefully investigated several alternatives. In the PICOSUN™ system we found many advantages over the others. For making good devices, good thermal stability and very uniform deposition are essential. We also love the handy operation system.

Picosun provides us high quality products, friendly and appropriate advice, and good after sales support. We are very satisfied with our ALD tool and we recommend PICOSUN™ systems to all research institutes to manufacture high quality ALD films and to companies to utilize the good research results.

Dr. Yuichi Harada, NTT Basic Research Laboratories, Atsugi, Japan

Read more  

ALD APPLICATIONS

  • Electronics

    Electronics
  • Sensors

    Sensors
  • Semiconductors

    Semiconductors
  • MEMS

    MEMS
  • Microchips

    Microchips
  • Corrosion protection

    Corrosion protection
  • Antitarnishing

    Antitarnishing
  • Energy storage

    Energy storage
  • Decorative coatings

    Decorative coatings
  • Lighting

    Lighting
  • Optics and displays

    Optics and displays
  • Nanotechnology

    Nanotechnology
  • Solar photovoltaics

    Solar photovoltaics

PICOSUN R-SERIES -
POWERING UP R&D 

r-sarja

PICOSUN™ R-series Atomic Layer Deposition (ALD) systems are optimized for research, product development and pilot production. The versatile reactor design enables deposition on 2-8’’ (50-200 mm) wafers, 3-dimensional objects and porous substrates.

Read more

PICOSUN P-SERIES -
DEFINING THE ALD PRODUCTION

p-sarja

PICOSUN™ P-series Atomic Layer Deposition (ALD) systems set a new standard for ALD production tools, providing extremely fast process times and very low cost of ownership with the patented design solely based on the requirements of the ALD method.

Read more 

EXAMPLES OF ALD MATERIALS*

Oxides
Al2O3, AlxTiyOz, Gd2O3, HfO2, In2O3, MgO, Sb2O3, SiO2, SrTiOx, Ta2O5, TiO2, Y2O3, ZnO, ZnO:Al, ZrO2
Nitrides
AlN, TiAlCN, TiN, TaNx
Carbides
TiC
Sulfides
Gd2O2S, In2S3, InxZnyS, ZnS
Fluorides   
CaF2, MgF2
Metals
Ag, Au, Cu, Ir, Pd, Pt, Ru

Self-assembled monolayers (SAMs) for growth inhibition

Polymers and inorganic-organic hybrid materials

* The list in non-inclusive - for more detailed information please contact Picosun directly.

Request a coating demo