Media

Oct 21, 2014:
Picosun ALD improves inkjets

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Sep 30, 2014:
Breakthrough in ALD-graphene by Picosun technology

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Aug 25, 2014:
Picosun joins forces with IMEC for novel, industrial ALD applications

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Archive

Customer testimonials

“I have known Picosun for about eight years, and I have always been impressed with this company. They have a real enthusiasm and commitment to ALD, and the staff is open and friendly and easy-going. I would recommend the PICOSUN™ R-series tool to any researcher in the field of ALD.”

“I am always confident of the support I will get from Picosun.“

Prof. Seán Barry, Carleton University, Ottawa, Canada

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ALD APPLICATIONS

  • Electronics

    Electronics
  • Sensors

    Sensors
  • Semiconductors

    Semiconductors
  • MEMS

    MEMS
  • Microchips

    Microchips
  • Corrosion protection

    Corrosion protection
  • Antitarnishing

    Antitarnishing
  • Energy storage

    Energy storage
  • Decorative coatings

    Decorative coatings
  • Lighting

    Lighting
  • Optics and displays

    Optics and displays
  • Nanotechnology

    Nanotechnology
  • Solar photovoltaics

    Solar photovoltaics

PICOSUN R-SERIES -
POWERING UP R&D 

r-sarja

PICOSUN™ R-series Atomic Layer Deposition (ALD) systems are optimized for research, product development and pilot production. The versatile reactor design enables deposition on 2-8’’ (50-200 mm) wafers, 3-dimensional objects and porous substrates.

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PICOSUN P-SERIES -
DEFINING THE ALD PRODUCTION

Picosun 300 mm ALD cluster tool with robot loader and FOUP station 1 SMALL

PICOSUN™ P-series Atomic Layer Deposition (ALD) systems set a new standard for ALD production tools, providing extremely fast process times and very low cost of ownership with the patented design solely based on the requirements of the ALD method.

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EXAMPLES OF ALD MATERIALS*

Oxides
Al2O3, AlxTiyOz, Gd2O3, HfO2, In2O3, MgO, Sb2O3, SiO2, SrTiOx, Ta2O5, TiO2, Y2O3, ZnO, ZnO:Al, ZrO2
Nitrides
AlN, TiAlCN, TiN, TaNx
Carbides
TiC
Sulfides
Gd2O2S, In2S3, InxZnyS, ZnS
Fluorides   
CaF2, MgF2
Metals
Ag, Au, Cu, Ir, Pd, Pt, Ru
   
Self-assembled monolayers (SAMs) for growth inhibition
 
Polymers and inorganic-organic hybrid materials
 

* The list in non-inclusive - for more detailed information please contact Picosun directly.

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