Media

Oct 21, 2014:
Picosun ALD improves inkjets

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Sep 30, 2014:
Breakthrough in ALD-graphene by Picosun technology

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Aug 25, 2014:
Picosun joins forces with IMEC for novel, industrial ALD applications

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Archive

Customer testimonials

Picosun offers a flexible system with a reaction chamber which design is excellent for our wide variety of substrates. The system is reliable, their support is great and there is lots of knowledge about ALD in the company. I would recommend Picosun to anyone who is looking for a research or production ALD system.
Dr. Mårten Rooth, Nanexa, Sweden

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ALD APPLICATIONS

  • Electronics

    Electronics
  • Sensors

    Sensors
  • Semiconductors

    Semiconductors
  • MEMS

    MEMS
  • Microchips

    Microchips
  • Corrosion protection

    Corrosion protection
  • Antitarnishing

    Antitarnishing
  • Energy storage

    Energy storage
  • Decorative coatings

    Decorative coatings
  • Lighting

    Lighting
  • Optics and displays

    Optics and displays
  • Nanotechnology

    Nanotechnology
  • Solar photovoltaics

    Solar photovoltaics

PICOSUN R-SERIES -
POWERING UP R&D 

r-sarja

PICOSUN™ R-series Atomic Layer Deposition (ALD) systems are optimized for research, product development and pilot production. The versatile reactor design enables deposition on 2-8’’ (50-200 mm) wafers, 3-dimensional objects and porous substrates.

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PICOSUN P-SERIES -
DEFINING THE ALD PRODUCTION

Picosun 300 mm ALD cluster tool with robot loader and FOUP station 1 SMALL

PICOSUN™ P-series Atomic Layer Deposition (ALD) systems set a new standard for ALD production tools, providing extremely fast process times and very low cost of ownership with the patented design solely based on the requirements of the ALD method.

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EXAMPLES OF ALD MATERIALS*

Oxides
Al2O3, AlxTiyOz, Gd2O3, HfO2, In2O3, MgO, Sb2O3, SiO2, SrTiOx, Ta2O5, TiO2, Y2O3, ZnO, ZnO:Al, ZrO2
Nitrides
AlN, TiAlCN, TiN, TaNx
Carbides
TiC
Sulfides
Gd2O2S, In2S3, InxZnyS, ZnS
Fluorides   
CaF2, MgF2
Metals
Ag, Au, Cu, Ir, Pd, Pt, Ru
   
Self-assembled monolayers (SAMs) for growth inhibition
 
Polymers and inorganic-organic hybrid materials
 

* The list in non-inclusive - for more detailed information please contact Picosun directly.

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