MicroElectroMechanical Systems (MEMS)
Picosun’s leading ALD equipment design enables always uniform and conformal thin film formation even on the most challenging 3D nanostructures such as ultra-high aspect ratio trenches, gaps, voids, steps, and vias – elements typical in MEMS devices. Nanolaminates with sharp interfaces can be easily manufactured with ALD with digital process control and repeatability – impossible to achieve with any other thin film coating method.
Possibility to low processing temperatures and the gentle, gas-phase nature of the deposition process are further attributes to make ALD an optimal method for manufacturing functional and structural MEMS layers such as
- Adhesion layers
- Diffusion barriers
- Charge dissipative layers
- Layers lowering frictional wear
- Optical layers
- Films to close nanoscale pores
- Biocompatible coatings
- Coatings for hermetical sealing
- Hydrophobic layers to decrease stiction
- Conformal, thermally conductive layers
- Conductive seed layers for plating purposes
- Etch masks and etch stop layers
- Conformal, electrically insulating layers
Today, various MEMS industries around the world utilize Picosun’s ALD technology in their production. PICOSUN™ 200 mm batch ALD tools are ideal for sensor, print head, MEMS microphone, and optical, medical, and bioMEMS production, to name a few key applications. The world-class process quality and equipment design are completed with a wide selection of industrial automation and loading options optimal for MEMS manufacturing: Batch loading with flipping mechanism, vacuum batch loading, cassette-to-cassette loading with cluster tools, and N2 cabinet loading.
Follow the links below to find the PICOSUN™ ALD equipment optimal for your
- PICOSUN™ P-300 Advanced
- PICOSUN™ P-300 Pro
- PICOPLATFORM™ 200
- PICOSUN™ R-200 Advanced
- PICOSUN™ R-200 Standard
Prior to purchase, our demo service ensures your ALD system is 100% optimized for your most demanding production needs. After purchase, our Picosupport™ services guarantee the most comprehensive after-sales care with fast lead times and 24/7/365 availability on request.
For further information, please contact Picosun directly at email@example.com.