Picosun’s ALD product portfolio covers all of your thin film coating needs from high throughput industrial production to lab- and pilot-scale research and product development, with unique upscalability, modularity, and versatility.
PICOSUN™ P-series ALD systems are optimized for high volume industrial manufacturing.
PICOSUN™ R-series ALD tools are ideal for R&D purposes and smaller scale pilot production.
To widen the range of ALD process chemistries with highest quality plasma-enhanced ALD, Picosun’s PICOPLASMA™ source system is available for both P- and R-series tools.
High throughput, parallel, and multifunctional thin film processing in cluster configuration is realized in PICOPLATFORM™ vacuum cluster systems with full industrial automation and SEMI compatibility.
To ensure always faultless performance of your PICOSUN™ ALD tool, nonstop production, highest yields, and minimal downtime, our customer-specifically tailored Picosupport™ after sales services ensure comprehensive solutions with fast lead times on 24/7/365 availability on request, with customer-specific content, scope, and duration.
According to hardware integration schemes, PICOSUN™ ALD tools are available in the following constructions:
Separate electrical cabinet, precursor sources directly integrated to the tool frame.
A combined electrical and precursor cabinet directly integrated to the tool frame. Cabinet can be made SEMI compatible.