Glove box compatibility

All of PICOSUN™ ALD tools can be integrated with various glove boxes to eliminate handling of moisture sensitive substrates in the air. Tools both with separate load locks or the standard elevator can be connected with a leak tight sealing to the glove box wall or bottom plate.

Moreover, having a glove box at hand reduces possible dangers to the operator when using or storing toxic, very volatile, oxygen or moisture sensitive precursors.

PICOSUN(TM) R-200 Standard ALD tool integrated with a glove box