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Picosun News, Summer 2015 now online!

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Jul 2, 2015:
Picosun and Carleton strike gold with ALD

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Jun 23, 2015:
Picosun ALD breaks through in medical technology

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May 22, 2015:
Picosun wins market in IC, MEMS, and LED manufacturing

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Archive

Customer testimonials

The good performance of Picosun’s ALD technology is well-known and trusted. We learned about Picosun through our industrial co-workers in LED manufacturing and the high technological quality and great achievements of the PICOSUN™ ALD systems motivated us to select one ourselves.

Picosun’s ALD equipment have demonstrated remarkable and reliable performance for electronic devices and optoelectronics production which is why we greatly recommend the semiconductor industries (for example Si-based FinFET, CMOS, LED, and display manufacturers) to consider PICOSUN™ ALD systems.

Professor Hao-Chung Kuo, National Chiao Tung University (NCTU), Taiwan

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ALD APPLICATIONS

  • Antitarnishing

    Antitarnishing
  • Electronics

    Electronics
  • Energy storage

    Energy storage
  • Decorative coatings

    Decorative coatings
  • Lighting

    Lighting
  • Optics and displays

    Optics and displays
  • Nanotechnology

    Nanotechnology
  • MEMS

    MEMS
  • Microchips

    Microchips
  • Sensors

    Sensors
  • Semiconductors

    Semiconductors

PICOSUN R-SERIES -
POWERING UP R&D

r-sarja

PICOSUN™ Rシリーズのアトミックレイヤーデポジション(ALD)成膜装置は、研究開発からパイロット生産向けに設計されたモデルです。様々なアプリケーションに対応可能で、2-8'' (50-200 mm)ウエハー、トレンチや立体的な構造、多孔性材料などへの成膜が可能です。

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PICOSUN P-SERIES -
DEFINING THE ALD PRODUCTION

Picosun 300 mm ALD cluster tool with robot loader and FOUP station 1 SMALL

PICOSUN™ Pシリーズのアトミックレイヤーデポジション(ALD)成膜装置は、生産におけるプロセス時間を著しく短縮しコストダウンを可能にする事ができる、特許に基づいた装置設計になっており、量産対応ALD成膜装置の新たなスタンダードとなる生産装置です。

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EXAMPLES OF ALD MATERIALS*

Oxides
Al2O3, AlxTiyOz, Gd2O3, HfO2, In2O3, MgO, Sb2O3, SiO2, SrTiOx, Ta2O5, TiO2, Y2O3, ZnO, ZnO:Al, ZrO2
Nitrides
AlN, TiAlCN, TiN, TaNx
Carbides
TiC
Sulfides
Gd2O2S, In2S3, InxZnyS, ZnS
Fluorides   
CaF2, MgF2
Metals
Ag, Au, Cu, Ir, Pd, Pt, Ru
   
Self-assembled monolayers (SAMs) for growth inhibition
 
Polymers and inorganic-organic hybrid materials
 

* The list in non-inclusive - for more detailed information please contact Picosun directly.

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