Media



May 22, 2015:
Picosun wins market in IC, MEMS, and LED manufacturing

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Apr 20, 2015:
Picosun ALD protects printed circuit boards

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Mar 31, 2015:
Picosun’s ALD technology protects pumps

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Archive

Customer testimonials

"We are impressed with the excellent customer support provided by Picosun, the excellent quality of our PICOSUN™ ALD system, and its simple, clear, intuitive, and secure software. We have installed our PICOSUN™ system at our university and we would recommend it to any academic institute carrying out cutting-edge research in nanotechnology and related areas. This is the smallest PICOSUN™ system. For production purposes one should consider a bigger PICOSUN™ system with options for automated operation."

Prof. Peter Lemmens and Dr. Andrey Bakin, University of Technology in Braunschweig, Germany

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ALD APPLICATIONS

  • Corrosion protection

    Corrosion protection
  • Antitarnishing

    Antitarnishing
  • Electronics

    Electronics
  • Energy storage

    Energy storage
  • Decorative coatings

    Decorative coatings
  • Lighting

    Lighting
  • Optics and displays

    Optics and displays
  • Nanotechnology

    Nanotechnology
  • Solar photovoltaics

    Solar photovoltaics
  • MEMS

    MEMS
  • Microchips

    Microchips
  • Sensors

    Sensors
  • Semiconductors

    Semiconductors

PICOSUN R-SERIES -
POWERING UP R&D

r-sarja

PICOSUN™ Rシリーズのアトミックレイヤーデポジション(ALD)成膜装置は、研究開発からパイロット生産向けに設計されたモデルです。様々なアプリケーションに対応可能で、2-8'' (50-200 mm)ウエハー、トレンチや立体的な構造、多孔性材料などへの成膜が可能です。

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PICOSUN P-SERIES -
DEFINING THE ALD PRODUCTION

p-sarja

PICOSUN™ Pシリーズのアトミックレイヤーデポジション(ALD)成膜装置は、生産におけるプロセス時間を著しく短縮しコストダウンを可能にする事ができる、特許に基づいた装置設計になっており、量産対応ALD成膜装置の新たなスタンダードとなる生産装置です。

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EXAMPLES OF ALD MATERIALS*

Oxides
Al2O3, AlxTiyOz, Gd2O3, HfO2, In2O3, MgO, Sb2O3, SiO2, SrTiOx, Ta2O5, TiO2, Y2O3, ZnO, ZnO:Al, ZrO2
Nitrides
AlN, TiAlCN, TiN, TaNx
Carbides
TiC
Sulfides
Gd2O2S, In2S3, InxZnyS, ZnS
Fluorides   
CaF2, MgF2
Metals
Ag, Au, Cu, Ir, Pd, Pt, Ru
   
Self-assembled monolayers (SAMs) for growth inhibition
 
Polymers and inorganic-organic hybrid materials
 

* The list in non-inclusive - for more detailed information please contact Picosun directly.

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