Media

Jul 3, 2014:
Novel, industrial metallization solutions from Picosun

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Jun 16, 2014:
PICOSUN™ P-300B ALD production tool is a success

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May 28, 2014:
New industrial ALD processes from Picosun

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Archive

Customer testimonials

"The fact that Picosun has been involved in the ALD industry since its infancy speaks volumes about their technical expertise and the learning curve that's gone into designing the tool."

" I would recommend the PICOSUN™ R-series platform to any academic or national laboratory looking to do thin film research. Operationally, the system is both flexible and robust enough to meet the demands of a highly technical, multiple user facility."

Mr. Bryant Colwill, Rensselaer Polytechnic Institute, Troy, New York, USA 

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ALD APPLICATIONS

  • Electronics

    Electronics
  • Sensors

    Sensors
  • Semiconductors

    Semiconductors
  • MEMS

    MEMS
  • Microchips

    Microchips
  • Corrosion protection

    Corrosion protection
  • Antitarnishing

    Antitarnishing
  • Energy storage

    Energy storage
  • Decorative coatings

    Decorative coatings
  • Lighting

    Lighting
  • Optics and displays

    Optics and displays
  • Nanotechnology

    Nanotechnology
  • Solar photovoltaics

    Solar photovoltaics

PICOSUN R-SERIES -
POWERING UP R&D

R-series nosto small

PICOSUN™ Rシリーズのアトミックレイヤーデポジション(ALD)成膜装置は、研究開発からパイロット生産向けに設計されたモデルです。様々なアプリケーションに対応可能で、2-8'' (50-200 mm)ウエハー、トレンチや立体的な構造、多孔性材料などへの成膜が可能です。

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PICOSUN P-SERIES -
DEFINING THE ALD PRODUCTION

P-series nosto small

PICOSUN™ Pシリーズのアトミックレイヤーデポジション(ALD)成膜装置は、生産におけるプロセス時間を著しく短縮しコストダウンを可能にする事ができる、特許に基づいた装置設計になっており、量産対応ALD成膜装置の新たなスタンダードとなる生産装置です。

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EXAMPLES OF ALD MATERIALS*

Oxides
Al2O3, AlxTiyOz, Gd2O3, HfO2, In2O3, MgO, Sb2O3, SiO2, SrTiOx, Ta2O5, TiO2, Y2O3, ZnO, ZnO:Al, ZrO2
Nitrides
AlN, TiAlCN, TiN, TaNx
Carbides
TiC
Sulfides
Gd2O2S, In2S3, InxZnyS, ZnS 
Fluorides    
CaF2, MgF2
Metals
Ag, Au, Cu, Ir, Pd, Pt, Ru

Self-assembled monolayers (SAMs) for growth inhibition

Polymers and inorganic-organic hybrid materials

* The list in non-inclusive - for more detailed information please contact Picosun directly.

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