Media

Aug 25, 2014:
Picosun joins forces with IMEC for novel, industrial ALD applications

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Jul 3, 2014:
Novel, industrial metallization solutions from Picosun

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Jun 16, 2014:
PICOSUN™ P-300B ALD production tool is a success

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Archive

Customer testimonials

Before purchasing our ALD system we carefully investigated several alternatives. In the PICOSUN™ system we found many advantages over the others. For making good devices, good thermal stability and very uniform deposition are essential. We also love the handy operation system.

Picosun provides us high quality products, friendly and appropriate advice, and good after sales support. We are very satisfied with our ALD tool and we recommend PICOSUN™ systems to all research institutes to manufacture high quality ALD films and to companies to utilize the good research results.

Dr. Yuichi Harada, NTT Basic Research Laboratories, Atsugi, Japan

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ALD APPLICATIONS

  • Electronics

    Electronics
  • Sensors

    Sensors
  • Semiconductors

    Semiconductors
  • MEMS

    MEMS
  • Microchips

    Microchips
  • Corrosion protection

    Corrosion protection
  • Antitarnishing

    Antitarnishing
  • Energy storage

    Energy storage
  • Decorative coatings

    Decorative coatings
  • Lighting

    Lighting
  • Optics and displays

    Optics and displays
  • Nanotechnology

    Nanotechnology
  • Solar photovoltaics

    Solar photovoltaics

PICOSUN R-SERIES -
POWERING UP R&D

r-sarja

PICOSUN™ Rシリーズのアトミックレイヤーデポジション(ALD)成膜装置は、研究開発からパイロット生産向けに設計されたモデルです。様々なアプリケーションに対応可能で、2-8'' (50-200 mm)ウエハー、トレンチや立体的な構造、多孔性材料などへの成膜が可能です。

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PICOSUN P-SERIES -
DEFINING THE ALD PRODUCTION

p-sarja

PICOSUN™ Pシリーズのアトミックレイヤーデポジション(ALD)成膜装置は、生産におけるプロセス時間を著しく短縮しコストダウンを可能にする事ができる、特許に基づいた装置設計になっており、量産対応ALD成膜装置の新たなスタンダードとなる生産装置です。

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EXAMPLES OF ALD MATERIALS*

Oxides
Al2O3, AlxTiyOz, Gd2O3, HfO2, In2O3, MgO, Sb2O3, SiO2, SrTiOx, Ta2O5, TiO2, Y2O3, ZnO, ZnO:Al, ZrO2
Nitrides
AlN, TiAlCN, TiN, TaNx
Carbides
TiC
Sulfides
Gd2O2S, In2S3, InxZnyS, ZnS
Fluorides   
CaF2, MgF2
Metals
Ag, Au, Cu, Ir, Pd, Pt, Ru
   
Self-assembled monolayers (SAMs) for growth inhibition
 
Polymers and inorganic-organic hybrid materials
 

* The list in non-inclusive - for more detailed information please contact Picosun directly.

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