ESPOO, Finland, 21st October, 2015 – Picosun Oy, the leading supplier of high quality Atomic Layer Deposition (ALD) equipment and solutions for global industries, reports continuous success for its plasma ALD technology.
Picosun’s patented* PICOPLASMA™ source system is now available on cluster integrated, SEMI S2 certified PICOSUN™ P-series production ALD modules. The remote, inductively coupled plasma with highly reactive radicals extends the selection of ALD processes and allows damage-free coating of sensitive substrates such as plastics, polymers, or metal foils. A prime example of this is the first low temperature ALD graphene deposition in a PICOSUN™ plasma ALD tool**.
The PICOPLASMA™ source system is also ideal for deposition of conductive materials such as pure metals or nitrides without risk of short-circuiting or particle formation. Its optimized design enables constant breakthroughs in ALD metal processes, such as the recently reported full wafer gold deposition using Picosun’s plasma ALD technology***.
“Plasma-assisted ALD processes, such as high quality noble metal or nitride layers, are becoming essential in the manufacturing of various microelectronic components. Especially in compound semiconductor device and MEMS manufacturing low processing temperatures, enabled by plasma ALD, are often crucial. The non-destructive, radical-based processing with our PICOPLASMA™ systems is enabling the future technology nodes for global semiconductor industries,” summarizes Juhana Kostamo, Managing Director of Picosun.
Picosun provides the most advanced ALD thin film technology and enables the industrial leap into the future by novel, cutting-edge coating solutions, with unmatched expertise in the field. Today, PICOSUN™ ALD systems are in daily production use in numerous major industries around the world. Picosun is based in Finland, with subsidiaries in North America, China, Taiwan, Singapore, and Japan, and a world-wide sales and support network. For further information visit www.picosun.com
* Patent No. US 9,095,869; multiple patents pending
** Breakthrough in ALD-graphene by Picosun technology
*** Picosun and Carleton strike gold with ALD