PICOSUN™ P-300 ALD systems have become the new standard in high volume ALD manufacturing.

Products

Picosun’s patented dual-chamber, hot-wall ALD reactor design with fully separated precursor inlets enables deposition of the highest quality ALD films with excellent yield, low particle levels, and superior electrical and optical performance.

The agile design and easy and fast maintenance of all PICOSUN™ ALD equipment ensures minimum system downtime and low cost-of-ownership. Picosun’s proprietary Picoflow™ diffusion enhancer technology enables uniform and conformal coatings even on ultra-high aspect ratio substrates (>2500:1) with production-proven processes.

Production

Semiconductor and other industries

P-300F
The PICOSUN™ P-300F ALD system is specially designed for production of IC components such as microprocessors, memories, and hard drives, and manufacturing of power electronics, mixed signal, and MEMS devices such as print heads, sensors, and microphones.
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P-300S
The PICOSUN™ P-300S ALD system is specially designed for production of IC components such as microprocessors, memories, and hard drives, and it is also suitable for MEMS devices such as print heads, sensors, and microphones.
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P-300B
The PICOSUN™ P-300B ALD system is specially designed for production of MEMS devices such as print heads, sensors, and microphones, and coating of 3D objects such as lenses, optics, mechanical parts, jewelry, coins, and medical implants.
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P-300BV
The PICOSUN™ P-300BV ALD system is specially designed for production of LEDs, discrete devices, and MEMS devices such as print heads, sensors, and microphones.
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P-1000
The PICOSUN™ P-1000 ALD system is designed for batch coating of various 3D objects such as mechanical parts, glass or metal sheets, coins, jewelry, or medical implants.
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R&D

Semiconductor and other industries

R-200 Advanced
The PICOSUN™ R-200 Advanced ALD systems are suitable for R&D on dozens of applications such as IC components, MEMS devices, displays, LEDs, lasers, and 3D objects such as lenses, optics, jewelry, coins, and medical implants.
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R-200 Standard
The PICOSUN™ R-200 Standard ALD systems are suitable for R&D on dozens of applications such as IC components, MEMS devices, displays, LEDs, lasers, and 3D objects such as lenses, optics, jewelry, coins, and medical implants.
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Customized ALD

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