Integrated circuits (IC)
Semiconductor manufacturing industry has been the main user of Atomic Layer Deposition since the early 2000s and it is Picosun’s main market area. ALD is the technology of choice in manufacturing of various integrated circuits on silicon and III-V semiconductors. Picosun offers leading edge ALD solutions for power electronics, mixed signal, advanced logic, new types of memories, and hard drives. Picosun’s ALD systems have the best cost of ownership in single wafer and batch production integrated in fully automated cluster tool platforms. Materials deposited range from oxides for high-k materials, insulators, patterning, passivation and moisture barrier layers to nitrides, carbides and pure metals for electrodes, diffusion barriers, interface layers and capping layers.