PICOSUN® P-1000

Technical Features

Typical substrate size and type

All kinds of 3-dimensional items such as mechanical machinery parts, glass or metal sheets, coins, watch parts and jewelry, lenses, optics, and medical equipment, surgical implants and implantable devices (PicoMEDICAL™ solutions)

Processing temperature and capacity

50 – 400°C

Typical processes

Al₂O₃, ZnO, TiO_2,SiO2, Y2O3

Substrate loading

Manual loading with loading accessory (e.g. forklift cart)

Precursors

Liquid, solid, gas, ozone
Level sensors, cleaning and refill service
Up to 7 sources with 6 separate inlets

The PICOSUN® P-1000 ALD system is designed for batch processing of various 3-dimensional items such as glass panels, mechanical machinery parts, coins, watch parts and jewelry, lenses, optics, and medical equipment, surgical implants and implantable devices (PicoMEDICAL™ solutions) in a production environment. The main applications include various passivation and barrier layers to significantly improve the performance and lifetime of the coated items. The PICOSUN® P-1000 ALD system offers innovative and agile design to enable the highest quality ALD depositions with excellent uniformity, maximum yields, minimum system downtime and low cost-of-ownership with production-proven processes.

The reliable, fast, and easy to maintain PICOSUN® P-1000 ALD system represents the cutting-edge of industrial ALD.