MEMS (Microelectromechanical systems) are found in day-to-day applications, such as car airbag accelerometers and microphones, or in the background of many invisible yet crucial applications, such as in micro-scale energy harvesting or various pressure sensors. MEMS combined with ALD makes for rugged and functional MEMS technology.
MEMS manufacturing industry utilizes the electrical and mechanical properties of silicon and other materials in various types of devices and applications. ALD is especially well suited for protecting and functionalizing layers in three-dimensional devices and features with high aspect ratios.
Picosun is the market leader in delivering cost-effective batch systems for MEMS applications, where high level of conformality and film quality is required. We offer a multitude of solutions for MEMS manufacturing, including: