MEMS (Microelectromechanical systems) are found in day-to-day applications, such as car airbag accelerometers and microphones, or in the background of many invisible yet crucial applications, such as in micro-scale energy harvesting or various pressure sensors. MEMS combined with ALD makes for rugged and functional MEMS technology.
MEMS manufacturing industry utilizes the electrical and mechanical properties of silicon and other materials in various types of devices and applications. ALD is especially well suited for protecting and functionalizing layers in three-dimensional devices and features with high aspect ratios.
Picosun is the market leader in delivering cost-effective batch systems for MEMS applications, where high level of conformality and film quality is required. We offer a multitude of solutions for MEMS manufacturing, including:
PICOSUN MAIN HEADQUARTERS Tietotie 3, FI-02150 Espoo Finland Tel. +358 50 321 1955
Field Service:
Request for a coating demo:
Request for a process/quote
© Copyright 2021 Picosun Oy. Picosun is a trademark or registered trademark of Picosun Oy | Privacy Statement
© Copyright 2021 Picosun Oy. Picosun is a trademark or registered trademark of Picosun Oy | Privacy Statement