Precision manufacturing
    Machine parts

    Metal components are becoming common substrates for ALD processing demands. Common examples are machinery parts, automotive or aerospace components, pump and compressor parts, and various vessels and containers, which may be exposed to substances and environments that cause wear and corrosion. Such use cases, among other applications, include

    • semiconductor manufacturing equipment – subjected to corrosive plasmas, gases and chemicals
    • gas or chemical containers – storing corrosive substances
    • space environments – parts may be exposed to oxidative and/or corrosive ion and plasma bombardment
    • heavily polluted areas – high levels of e.g. acidic or sulphur compounds in the air

    A hermetic and strong encapsulation for various sizes and shapes

    ALD is an effective and versatile method for protecting metal parts of various sizes, shapes and use cases against corrosion. ALD thin films form a hermetic encapsulation around the component, and cover even the smallest microscale surface details with unmatched conformality and uniformity. The ultra-thin but dense and pinhole-free ALD film does not increase the coated object’s mass or dimensions. As the ALD process takes place at moderate temperatures and from gaseous precursors, it does not cause surface damage to the coated object.

    Picosun offers various ALD processes for protecting metal parts. Depending on application and required level of protection, either single oxide films, stacked layers or nanolaminates can be used.

    If you are adamant about particularly strong protection, ALD can deliver that. The protection that ALD itself provides can be enhanced by combining ALD with PVD. PVD forms a thick, “crude” film on the object’s surface and ALD is then applied on the PVD film to block cracks and pinholes, blocking corrosive substances from entering the surface. In essence, the ALD film works as a “sealant” and the PVD film provides the sturdiness and robustness often needed especially in metal machinery parts and other industrial items’ protection.

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