Machinery and other metal parts

Metal items such as machinery parts, automotive or aerospace components, pump and compressor parts, and various vessels and containers may be exposed to substances and environments that cause wear and corrosion. Examples are e.g. semiconductor manufacturing equipment where corrosive plasmas, gases and chemicals are used, gas or chemical containers used to store corrosive substances, space environments where the parts may be exposed to oxidative and/or corrosive ion and plasma bombardment, and heavily polluted areas where air contains high levels of e.g. acidic or sulphur compounds.

ALD offers an effective way to protect metal parts against corrosion. ALD thin film forms hermetic encapsulation around the component, and covers even the smallest microscale surface details with unmatched conformality and uniformity. Ultra-thin but dense and pinhole-free ALD film does not increase the mass or dimensions of the coated object. As ALD process takes place at moderate temperatures and from gaseous precursors, it does not cause surface damage to the coated object. Picosun offers various ALD processes for metal parts protection. Depending on application and required level of protection, either single oxide films or stacked layers/nanolaminates can be used.

Particularly strong protection can be achieved by combining ALD with PVD. PVD forms thick, “crude” film on the object’s surface and ALD is then applied on the PVD film to block cracks and pinholes in it, through which the corrosive substances might be able to enter the surface. In other words, ALD film works as a “sealant” whereas the PVD film provides the sturdiness and robustness often needed especially in metal machinery parts and other industrial items protection.

Picosun products for metal parts protection

PICOSUN® R&D systems
PicoSupport™ services